Title:
BULK ACOUSTIC WAVE RESONATOR HAVING ELECTRODE HAVING GAP LAYER, AND FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/077711
Kind Code:
A1
Abstract:
The present invention relates to relates to a bulk acoustic wave resonator, comprising: a substrate; an acoustic mirror; a bottom electrode; a top electrode; and a piezoelectric layer, arranged between the bottom electrode and the top electrode; the bottom electrode and/or the top electrode are gap electrodes, the gap electrode has at least one gap layer, and in the direction of the thickness of the gap electrode, there is a distance between the gap layer and the top and bottom surfaces of the gap electrode. The gap electrode has a plurality of electrode layers arranged stacked in the direction of the thickness of the resonator and connected to each other in parallel, and the gap layer is arranged between the corresponding electrode layers. The present invention also relates to a filter having the described resonator and an electronic device having the filter or resonator.
Inventors:
PANG WEI (CN)
XU YANG (CN)
HAO LONG (CN)
ZHANG MENGLUN (CN)
YANG QINGRUI (CN)
XU YANG (CN)
HAO LONG (CN)
ZHANG MENGLUN (CN)
YANG QINGRUI (CN)
Application Number:
PCT/CN2020/088660
Publication Date:
April 29, 2021
Filing Date:
May 06, 2020
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02
Foreign References:
CN111130490A | 2020-05-08 | |||
CN111162748A | 2020-05-15 | |||
CN111245394A | 2020-06-05 | |||
CN111010122A | 2020-04-14 | |||
CN111082776A | 2020-04-28 | |||
CN111082774A | 2020-04-28 | |||
US20170077385A1 | 2017-03-16 | |||
US20140175950A1 | 2014-06-26 |
Other References:
ZHANG HAO; ZHANG ZHIJIE; ZHAI YUPENG; CHENG HAO; WU YONGSHENG: "Design of a Novel FBAR Structure", ELECTRONIC COMPONENTS AND MATERIALS, vol. 38, no. 3, 31 March 2019 (2019-03-31), pages 50 - 55,61, XP009527664, ISSN: 1001-2028, DOI: 10.14106/j.cnki.1001-2028.2019.03.009
See also references of EP 4068627A4
See also references of EP 4068627A4
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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