Title:
BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREFOR, FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/042740
Kind Code:
A1
Abstract:
A bulk acoustic wave resonator comprises: a substrate; an acoustic mirror (10); a bottom electrode (11); a top electrode (13); and a piezoelectric layer (12), wherein: an area where the acoustic mirror (10), the bottom electrode (11), the piezoelectric layer (12), and the top electrode (13) overlap in the thickness direction of the substrate is an effective area of the resonator; the resonator further comprises an etching stop layer for the bottom electrode (11), the etching stop layer being arranged on the top surface of the bottom electrode (11); the inner end of the etching stop layer is located within the effective area in a cross-sectional view of the resonator and overlaps with the top electrode (13), and an end portion of the top electrode (13) forms a step structure on the basis of the overlap. The present application further relates to a filter and an electronic device, as well as a manufacturing method for the bulk acoustic wave resonator.
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Inventors:
YANG QINGRUI (CN)
PANG WEI (CN)
ZHANG MENGLUN (CN)
PANG WEI (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2020/086561
Publication Date:
March 11, 2021
Filing Date:
April 24, 2020
Export Citation:
Assignee:
UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17; H03H3/02; H03H9/02
Foreign References:
CN111010133A | 2020-04-14 | |||
CN109167585A | 2019-01-08 | |||
CN109639251A | 2019-04-16 | |||
US20180013397A1 | 2018-01-11 | |||
CN103607178A | 2014-02-26 |
Other References:
See also references of EP 4027519A4
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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