Title:
BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREFOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/077713
Kind Code:
A1
Abstract:
Disclosed is a bulk acoustic wave resonator, comprising: a substrate; an acoustic mirror; a top electrode; a bottom electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode, wherein the overlapping region of the top electrode, the bottom electrode, the acoustic mirror, and the piezoelectric layer in the thickness direction of the resonator defines the effective region of the resonator. The bottom electrode and/or the top electrode are gap electrodes. The gap electrode has a first electrode and a second electrode. The first electrode is attached to the piezoelectric layer. A gap layer is defined between the first electrode and the second electrode. The resonator is located between the first and second electrodes in the height direction of the resonator. The gap electrode is provided with a release channel for forming the gap layer. The release channel is communicated with the gap layer. The release channel comprises an electrode channel portion which is provided in a non-effective region of the electrode. The present invention also relates to a filter having the resonator and an electronic device having the filter or the resonator, and a method for manufacturing the resonator.
Inventors:
PANG WEI (CN)
XU YANG (CN)
HAO LONG (CN)
ZHANG MENGLUN (CN)
YANG QINGRUI (CN)
XU YANG (CN)
HAO LONG (CN)
ZHANG MENGLUN (CN)
YANG QINGRUI (CN)
Application Number:
PCT/CN2020/088663
Publication Date:
April 29, 2021
Filing Date:
May 06, 2020
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
| US20170077385A1 | 2017-03-16 | |||
| CN105262456A | 2016-01-20 | |||
| CN103607178A | 2014-02-26 | |||
| CN110166014A | 2019-08-23 | |||
| CN109802646A | 2019-05-24 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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