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Patent Searching and Data


Title:
CARRIER PLATE, GROWTH DEVICE AND GROWTH METHOD FOR GROWING THIN FILM ON SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2020/232602
Kind Code:
A1
Abstract:
A carrier plate for growing a thin film on a substrate, comprising: a carrier plate body; the body comprises an upper surface side and lower surface side that are opposite to each other, and a hole that penetrates from the upper surface side to the lower surface side; a plurality of grooves is provided on a side wall of a side of the hole, and platform surfaces are provided in the grooves; a plurality of support blocks for supporting the substrate are supported on an inner side wall and may be separately detached from the carrier plate body; and each support block comprises a first part protrusion that extends laterally from a side wall of the carrier plate body to the interior of the hole, comprises a second part protrusion that is inserted into one groove on the side wall and that is supported by the platform surface in the groove, and comprises a third part connecting the first part protrusion and the second part protrusion. A part of each support block is designed to be installed in a groove of an inner side wall of a counterbore of the carrier plate, so that no additional fixing members are required, installation and disassembly are convenient, the service life of the carrier plate body is improved, and production costs are reduced.

Inventors:
CHANG CHUNG-YING (CN)
CHANG HUNG-MING (CN)
LO YUN-MING (CN)
Application Number:
PCT/CN2019/087628
Publication Date:
November 26, 2020
Filing Date:
May 20, 2019
Export Citation:
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Assignee:
XIAMEN SANAN OPTOELECTRONICS CO LTD (CN)
International Classes:
H01L21/673
Foreign References:
JP2011018662A2011-01-27
JP2014212245A2014-11-13
CN107658243A2018-02-02
CN106033738A2016-10-19
CN103811401A2014-05-21
CN101770972A2010-07-07
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