Title:
CATHODE FOR PLASMA TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/142351
Kind Code:
A1
Abstract:
The present invention relates to a cathode for generating plasma so as to perform predetermined treatment for a material to be treated and, more specifically, to a cathode being capable of generating plasma in all directions in a range of 360° around the cathode. The present invention comprises: an electrode tube which is made from a conductive material and of which the inside is hollow; and a plurality of magnets provided inside the electrode tube, and aligned such that the same poles thereof face each other.
Inventors:
LEE CHAN YONG (KR)
LEE SANG YONG (KR)
LEE SANG YONG (KR)
Application Number:
PCT/KR2017/001786
Publication Date:
August 24, 2017
Filing Date:
February 17, 2017
Export Citation:
Assignee:
LEE CHAN YONG (KR)
International Classes:
H01J37/34; C23C14/35; H01L21/02; H01L21/285; H05H1/46
Foreign References:
| JP2002363735A | 2002-12-18 | |||
| KR20090033718A | 2009-04-06 | |||
| KR20050108488A | 2005-11-16 | |||
| JPH1192942A | 1999-04-06 | |||
| JPH09129609A | 1997-05-16 |
Attorney, Agent or Firm:
SEWON PATENT LAW FIRM (KR)
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