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Title:
CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/115868
Kind Code:
A1
Abstract:
In this ceramic sintered body (3), the Zr content is 17.5-23.5 mass% in terms of ZrO2, the Hf content is 0.3-0.5 mass% in terms of HfO2, the Al content is 74.3-80.7 mass% in terms of Al2O3, the Y content is 0.8-1.9 mass% in terms of Y2O3, the Mg content is 0.1-0.8 mass% in terms of MgO, the Si content is 0.1-1.5 mass% in terms of SiO2, the Ca content is 0.03-0.35 mass% in terms of CaO, the total of the Na content and the K content is 0.01-0.10 mass% when the Na content is in terms of Na2O and the K content is in terms of K2O, and the balance content is 0.05 mass% or less in terms of oxides. The sum of the Mg content in terms of MgO, the Si content in terms of SiO2, the Ca content in terms of CaO, the Na content in terms of Na2O, the K content in terms of K2O, and the balance content is 0.3-2.0 mass%.

Inventors:
UMEDA YUJI (JP)
OOGAMI JYUNJI (JP)
Application Number:
PCT/JP2018/044942
Publication Date:
June 11, 2020
Filing Date:
December 06, 2018
Export Citation:
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Assignee:
NGK INSULATORS LTD (JP)
NGK ELECTRONICS DEVICES INC (JP)
International Classes:
C04B35/119
Domestic Patent References:
WO2016208766A12016-12-29
WO2017217490A12017-12-21
WO2014103465A12014-07-03
WO2010114126A12010-10-07
WO2016208766A12016-12-29
Foreign References:
JPH06107454A1994-04-19
JPS56140072A1981-11-02
JP4717960B22011-07-06
JP2015534280A2015-11-26
Other References:
See also references of EP 3854766A4
Attorney, Agent or Firm:
SHINJYU GLOBAL IP (JP)
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