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Title:
CERAMIC STRUCTURE AND METHOD OF MANUFACTURING CERAMIC STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2020/110850
Kind Code:
A1
Abstract:
A heater according to the present invention comprises a substrate and an internal conductor. The substrate is composed of ceramic. The internal conductor is positioned in the substrate and has a connection portion. The substrate has a space extending from the connection portion to a lower surface of the substrate. The space includes a first space and a second space. The first space adjoins the connection portion. The second space provides communication between the first space and the outside of the lower surface of the substrate, and is smaller than the first space when viewed in plan through the lower surface of the substrate.

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Inventors:
KAWANABE YASUNORI (JP)
ISHIMINE YUUSAKU (JP)
MUNEISHI TAKESHI (JP)
OKAWA YOSHIHIRO (JP)
Application Number:
PCT/JP2019/045380
Publication Date:
June 04, 2020
Filing Date:
November 20, 2019
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; B28B11/00; H05B3/02; H05B3/74
Foreign References:
JP2018016536A2018-02-01
JP2013084938A2013-05-09
JP2003179127A2003-06-27
JP2008305968A2008-12-18
JP2017153254A2017-08-31
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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