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Patent Searching and Data


Title:
CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD
Document Type and Number:
WIPO Patent Application WO/2016/166805
Kind Code:
A1
Abstract:
A charged particle beam device wherein a transmission image corresponding to an arbitrary diffraction spot or a diffraction pattern corresponding to a partial range in the transmission image are easily and automatically captured. A charged particle beam device having: an image-capturing unit for forming an image of a sample; a diaphragm disposed in the image-capturing unit, a plurality of openings having different sizes for transmitting an electron beam from the sample being formed in the diaphragm; a movement unit for varying the position of the diaphragm; and a display unit for displaying the formed image, wherein when the operator selects, e.g., a diffraction spot (A) on the display unit, the movement unit moves the diaphragm from the positional relationship between the diaphragm and the image in accordance with the position of the diffraction spot (A).

Inventors:
HANAWA AKINARI (JP)
KIKUCHI HIDEKI (JP)
TANIGUCHI YOSHIFUMI (JP)
YAGUCHI TOSHIE (JP)
DOBASHI TAKASHI (JP)
WATANABE KEITARO (JP)
TAMAKI HIROKAZU (JP)
Application Number:
PCT/JP2015/061407
Publication Date:
October 20, 2016
Filing Date:
April 14, 2015
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/26; H01J37/09; H01J37/295
Foreign References:
JP2007122998A2007-05-17
JPH04366539A1992-12-18
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
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