Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/161795
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a charged particle beam device that can predict the lifespan of a filament of a charged particle beam source with an inexpensive and simple circuit configuration. The charged particle beam device according to the present invention comprises a booster circuit that boosts the voltage supplied to the filament, and predicts the residual lifespan of the filament using a measured value of a current flowing to a low voltage side of the booster circuit (see FIG. 3).
Inventors:
SUGA ANORU (JP)
YABU SHUHEI (JP)
ISHIZAWA KAZUKI (JP)
HATANO MICHIO (JP)
YABU SHUHEI (JP)
ISHIZAWA KAZUKI (JP)
HATANO MICHIO (JP)
Application Number:
PCT/JP2019/004023
Publication Date:
August 13, 2020
Filing Date:
February 05, 2019
Export Citation:
Assignee:
HITACHI HIGH-TECH CORP (JP)
International Classes:
H01J37/248; H01J1/13; H01J37/06
Foreign References:
| US20150355264A1 | 2015-12-10 | |||
| JP2018032561A | 2018-03-01 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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