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Patent Searching and Data


Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/070338
Kind Code:
A1
Abstract:
Observation of biochemical samples and liquid samples that is easy and has high observation throughput is made possible while reducing the risk of damage to a sample holder. The sample holder for holding a sample has: a sample chamber having a mutually facing first insulating thin film 110 and a sample holding layer that hold therebetween a sample 200, which is a liquid or a gel; and a vacuum partition that secures the sample chamber holding the sample in the interior so that electron beams are irradiated on the first insulating thin film, and keeps the space within the vacuum partition at a vacuum degree that is at least lower than the sample compartment during observation of the sample. In this charged particle beam device, when doing vacuum exhausting of the surrounding atmosphere of the sample holder from atmospheric pressure, vacuum exhausting is started at a first exhaust speed, and thereafter, the exhaust speed of the first stage vacuum exhaust system is adjusted to reach a second exhaust speed that is faster than the first exhaust speed.

Inventors:
HATANO MICHIO (JP)
NAKAMURA MITSUHIRO (JP)
Application Number:
PCT/JP2019/040078
Publication Date:
April 15, 2021
Filing Date:
October 10, 2019
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20; H01J37/18
Domestic Patent References:
WO2013035866A12013-03-14
Foreign References:
JP2016072184A2016-05-09
JPS61101686A1986-05-20
JPS6269509A1987-03-30
JP2014026840A2014-02-06
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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