Title:
CHEMICAL MECHANICAL PLANARIZATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/047942
Kind Code:
A1
Abstract:
Disclosed is a chemical mechanical planarization apparatus, comprising a polishing module, a cleaning unit (200) and a wafer transmission module, wherein the polishing module includes two columns of polishing unit arrays (100), and each column of polishing unit arrays (100) includes multiple groups of polishing units (110); loading/unloading stages (116) corresponding to the two columns of polishing unit arrays (100) are longitudinally arranged in the column direction of the polishing unit arrays (100); and work portion wafer transmission units (120) of the wafer transmission module are located vertically above the loading/unloading stages (116), so as to complete transmission of wafers between other loading/unloading areas and the loading/unloading stages (116), and between the loading/unloading stages (116). Since the wafer transmission units (120) are arranged above the loading/unloading stages (116), when polishing heads load or unload wafers at the loading/unloading stages (116), the wafer transmission units (120) can run through the polishing units (110) at any time without being interfered with; and using this layout facilitates reduction of a transmission distance, thereby significantly improving the processing efficiency of the chemical mechanical planarization apparatus compared to that of a similar apparatus.
Inventors:
GU HAIYANG (CN)
ZHANG ZHIJUN (CN)
GU FENG (CN)
WANG DONGHUI (CN)
ZHANG ZHIJUN (CN)
GU FENG (CN)
WANG DONGHUI (CN)
Application Number:
PCT/CN2018/110052
Publication Date:
March 12, 2020
Filing Date:
October 12, 2018
Export Citation:
Assignee:
HANGZHOU SIZONE ELECTRONIC TECH CO LTD (CN)
International Classes:
B24B37/04; B24B29/02; H01L21/67; H01L21/677
Foreign References:
| CN203282328U | 2013-11-13 | |||
| CN108155126A | 2018-06-12 | |||
| CN101277787A | 2008-10-01 | |||
| US7335092B1 | 2008-02-26 | |||
| CN105870045A | 2016-08-17 | |||
| CN107622965A | 2018-01-23 | |||
| CN103252705A | 2013-08-21 |
Attorney, Agent or Firm:
NANJING ZHISHI LAW FIRM OF INTELLECTUAL PROPERTY (CN)
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