Title:
CIRCUIT MANUFACTURING METHOD AND SUPERCONDUCTING CIRCUIT
Document Type and Number:
WIPO Patent Application WO/2020/261667
Kind Code:
A1
Abstract:
Provided is a circuit in which a substantially even number of Josephson junctions are lined up in series. A circuit manufacturing method according to the present disclosure is a circuit manufacturing method using deposition, wherein a circuit, in which Josephson junctions are lined up, is obtained by performing first deposition for forming a first superconductor layer (2), oxidizing the surface of the first superconductor layer (2) to form an oxide film (3), and performing second deposition for forming a second superconductor layer (4). A mask (10) has two opening parts (11) and the odd number of first-type opening parts (12A). The width of the first-type opening part (12A) corresponds to a length at which the area of a Josephson junction formed on the basis of the first superconductor layer (2) and the second superconductor layer (4) derived from the first-type opening part (12A) is larger than the area of a Josephson junction formed on the basis of the first superconductor layer (2) and the second superconductor layer (4) derived from the two adjacent opening parts.
Inventors:
YAMAJI TOMOHIRO (JP)
YAMAMOTO TSUYOSHI (JP)
YAMAMOTO TSUYOSHI (JP)
Application Number:
PCT/JP2020/011387
Publication Date:
December 30, 2020
Filing Date:
March 16, 2020
Export Citation:
Assignee:
NEC CORP (JP)
International Classes:
H01L39/24; H01L21/203
Foreign References:
| US20190137891A1 | 2019-05-09 | |||
| US4218532A | 1980-08-19 | |||
| JPS63318176A | 1988-12-27 | |||
| JPH03274772A | 1991-12-05 |
Attorney, Agent or Firm:
IEIRI Takeshi (JP)
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