Title:
CLEANING DEVICE AND SPRAYING DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2020/087984
Kind Code:
A1
Abstract:
A cleaning device (2) and a spraying device using same. The cleaning device comprises a bracket (20), a drive member (21), and a sliding sheet (22). The drive member (21) is fixed on the bracket (20). The sliding sheet (22) is able to extend into a device to be cleaned. The drive member (21) is connected to the sliding sheet (22) to drive the sliding sheet (22) to move within the device to be cleaned. By cleaning a spray nozzle (3) of the spraying device using the cleaning device (2), photoresist residues can be effectively removed, thereby avoiding the block of the spray nozzle.
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Inventors:
WEI FAN (CN)
Application Number:
PCT/CN2019/096020
Publication Date:
May 07, 2020
Filing Date:
July 15, 2019
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
B08B3/02; B08B1/00; B08B13/00; G03F7/30
Foreign References:
| CN109570075A | 2019-04-05 | |||
| CN201473344U | 2010-05-19 | |||
| CN101947533A | 2011-01-19 | |||
| CN202921605U | 2013-05-08 | |||
| CN204746931U | 2015-11-11 | |||
| KR20120066481A | 2012-06-22 | |||
| JPH08257514A | 1996-10-08 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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