Title:
CLEANING DEVICE FOR SURFACE PLATE CORRECTING DRESSER
Document Type and Number:
WIPO Patent Application WO/1999/046083
Kind Code:
A1
Abstract:
A cleaning device capable of easily and securely washing out deposit adhering to a surface plate correcting dresser (6) of a surface polishing machine, comprising an air nozzle (15) for bubbling, a first lower surface brush (18) in contact slidably with a dressing member (9), and second lower surface brushes (22a, 22b) in contact slidably with those parts (6a) other than the dressing member (9), all of which are installed inside a cleaning tank (11) which stores the dresser (6) having the dressing member (9) on the lower surface thereof under the condition that they are immersed in cleaning fluid, and a side surface brush (25) in contact with the outer surface of the dresser (6).
Inventors:
HIRATA KAZUHIKO (JP)
Application Number:
PCT/JP1999/001145
Publication Date:
September 16, 1999
Filing Date:
March 10, 1999
Export Citation:
Assignee:
SPEEDFAM CO LTD (JP)
HIRATA KAZUHIKO (JP)
HIRATA KAZUHIKO (JP)
International Classes:
B08B1/00; B08B3/00; B08B3/04; B08B3/10; B08B5/02; B24B53/007; B24B53/017; B24B53/12; H01L21/00; H01L21/304; (IPC1-7): B24B37/00; B24B53/00
Foreign References:
| JPH09254017A | 1997-09-30 | |||
| JPH09254018A | 1997-09-30 | |||
| JPH10202504A | 1998-08-04 |
Attorney, Agent or Firm:
Hayashi, Hiroshi (Nishishinjuku 1-chome Shinjuku-ku, Tokyo, JP)
Download PDF:
Previous Patent: METHOD FOR PRODUCING A HIGH-QUALITY SURFACE, WIDE-WHEEL GRINDING DEVICE AND USE OF SAME
Next Patent: WRENCH WITH RATCHETING ACTION
Next Patent: WRENCH WITH RATCHETING ACTION