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Title:
COATING METHOD AND COATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/002269
Kind Code:
A1
Abstract:
A coating method that supplies a treatment solution to a substrate, and coats the substrate with the treatment solution using a spin coating process, wherein a solvent for the treatment solution having lower surface tension than the treatment solution is supplied to the substrate by being mixed in the treatment solution simultaneously with starting the supply of the treatment solution or after starting the supply of the treatment solution.

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Inventors:
HASHIMOTO YUSAKU (JP)
KAWAKITA MASATOSHI (JP)
YOSHIHARA KOSUKE (JP)
Application Number:
PCT/JP2020/024990
Publication Date:
January 07, 2021
Filing Date:
June 25, 2020
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B05C11/08; B05D1/40
Foreign References:
JPH10272407A1998-10-13
JP2019046850A2019-03-22
JPH05259063A1993-10-08
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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