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Patent Searching and Data


Title:
COMPOSITION FOR IMPRINT PATTERN FORMATION, CURED OBJECT, METHOD FOR PRODUCING IMPRINT PATTERN, DEVICE, AND METHOD FOR PRODUCING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/163597
Kind Code:
A1
Abstract:
A composition for imprint pattern formation which comprises a polymerizable compound, a polymerization initiator, and a derivative of the polymerization initiator; a cured object obtained from the composition for imprint pattern formation; a device including the cured object; a method for producing an imprint pattern using the composition for imprint pattern formation; and a method for producing a device, the method including said method for producing an imprint pattern.

Inventors:
HAKAMATA Akihiro (JP)
Application Number:
PCT/JP2022/002488
Publication Date:
August 04, 2022
Filing Date:
January 25, 2022
Export Citation:
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Assignee:
FUJIFILM CORPORATION (JP)
International Classes:
C08F290/06; C08F299/00; C08F2/50; H01L21/027; B29C59/02
Attorney, Agent or Firm:
SIKS & CO. (JP)
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