Title:
COMPOUND, RADICAL POLYMERIZATION INITIATOR, METHOD FOR PRODUCING COMPOUND, POLYMER, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN
Document Type and Number:
WIPO Patent Application WO/2012/173235
Kind Code:
A1
Abstract:
A compound represented by formula (I) [wherein R1 represents a hydrocarbon group having 1-10 carbon atoms, and Z represents a hydrocarbon group having 1-10 carbon atoms or a cyano group, wherein R1 and Z may be bound to each other to form a ring; X represents a bivalent linking group and has any one group selected from -O-C(=O)-,-NH-C(=O)- and-NH-C(=NH)- at an end that is in contact with Q; p represents an integer of 1-3; Q represents a hydrocarbon group having a valency of (p+1) and may be a single bond only when p is 1; R2 represents a single bond, an alkylene group which may have a substituent, or an arylene group which may have a substituent; q represents 0 or 1; r represents an integer of 0-8; and A+ represents a metal cation or an organic cation].
Inventors:
UTSUMI YOSHIYUKI (JP)
DAZAI TAKAHIRO (JP)
IWASHITA JUN (JP)
KONNO KENRI (JP)
DAZAI TAKAHIRO (JP)
IWASHITA JUN (JP)
KONNO KENRI (JP)
Application Number:
PCT/JP2012/065389
Publication Date:
December 20, 2012
Filing Date:
June 15, 2012
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD (JP)
UTSUMI YOSHIYUKI (JP)
DAZAI TAKAHIRO (JP)
IWASHITA JUN (JP)
KONNO KENRI (JP)
UTSUMI YOSHIYUKI (JP)
DAZAI TAKAHIRO (JP)
IWASHITA JUN (JP)
KONNO KENRI (JP)
International Classes:
C07C303/22; C07C309/12; C08F4/04; G03F7/004; G03F7/039; H01L21/027
Foreign References:
| JP2010095643A | 2010-04-30 | |||
| JP2010077404A | 2010-04-08 | |||
| US20020055124A1 | 2002-05-09 | |||
| JP2010037528A | 2010-02-18 | |||
| JPH0665310A | 1994-03-08 | |||
| GB916782A | 1963-01-30 |
Other References:
SEDLAK,M. ET AL.: "Synthesis and characterization of new surface active azo initiators for radical reactions", MOLECULES [ELECTRONIC PUBLICATION], vol. 5, no. 5, 2000, pages 730 - 736
IMROZ ALI,A.M. ET AL.: "Comparing emulsion polymerization of methacrylate-monomers with different hydrophilicity", POLYMER, vol. 46, no. 4, 2005, pages 1017 - 1023
ASLAMAZOVA,T.R. ET AL.: "On the colloidal stability of poly(methyl methacrylate) and polystyrene particles prepared with surface-active initiators", COLLOIDS AND SURFACES, A: PHYSICOCHEMICAL AND ENGINEERING ASPECTS, vol. 300, no. 3, 2007, pages 260 - 267
IMROZ ALI,A.M. ET AL.: "Comparing emulsion polymerization of methacrylate-monomers with different hydrophilicity", POLYMER, vol. 46, no. 4, 2005, pages 1017 - 1023
ASLAMAZOVA,T.R. ET AL.: "On the colloidal stability of poly(methyl methacrylate) and polystyrene particles prepared with surface-active initiators", COLLOIDS AND SURFACES, A: PHYSICOCHEMICAL AND ENGINEERING ASPECTS, vol. 300, no. 3, 2007, pages 260 - 267
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
Sumio Tanai (JP)
Sumio Tanai (JP)
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Claims:
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