CONSTANT SPINDLE POWER GRINDING METHOD

WIPO Patent Application WO2001030534

A3

A method is disclosed in which the component is rotated through only one revolution during a finish grinding step, and the depth of cut and the headstock (12) velocity are controlled during the signal rotation, so as to maintain a substantially constant load on the grinding wheel spindle drive motor (28, 30). Preferably the depth of cut is kept constant and the component speed of rotation is altered in order to maintain the constant power requirement, without exceeding the maximum power capability of the spindle motor. The component speed is altered from one point to another during each revolution so as to maintain the constant load. In another method, the headstock (12) velocity is linked to the power capabilities of the grinding wheel spindle drive (28, 30), and a significant grinding force is maintained between the wheel and the component up to the end of the grinding process including during finish grinding.

WO/2002/009906	APPARATUS AND METHOD FOR CHEMICAL MECHANICAL POLISHING OF SUBSTRATES
JP2014053352	WAFER PROCESSING METHOD
JP2003094318	THINNING METHOD FOR CRYSTAL COMPOSITE PLATE

MAVRO-MICHAELIS DANIEL ANDREW (GB)

PCT/GB2000/004136

May 10, 2002

October 26, 2000

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UNOVA UK LTD (GB)
MAVRO MICHAELIS DANIEL ANDREW (GB)

B24B1/00; B24B5/42; B24B19/12; B24B27/00; B24B49/00; B24B49/16; (IPC1-7): B24B1/00; B24B19/12; B24B49/16

WO1992007690A1

1992-05-14

US4528781A	1985-07-16
EP0903200A1	1999-03-24
US4118900A	1978-10-10
EP0315469A2	1989-05-10
US4085551A	1978-04-25

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