Title:
CONVEYANCE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2013/150841
Kind Code:
A1
Abstract:
Provided is a conveyance system with which accommodating space of objects to be conveyed can be ensured, and with which an improvement in conveyance efficiency of the objects to be conveyed is achieved. The conveyance system is provided with: a stacker crane (30) for carrying, into and out of loading ports (54, 56) of semiconductor producing devices (50, 52), objects (10) to be conveyed; vehicles (40) which travel along rails (R2) provided above the loading ports (54, 56), and on which grippers (44) for gripping the objects (10) to be conveyed are made to ascend and descend to convey the objects (10) to be conveyed; and accommodating shelves (20) which are provided in the vicinity of the semiconductor producing devices (50, 52), which accommodate the objects (10) to be conveyed, and which enable the stacker crane (30) to deposit and withdraw the objects (10) to be conveyed. As a result of the stacker crane (30) and the vehicles (40), the objects (10) to be conveyed can be carried into and out of the loading ports (54, 56).
Inventors:
YAMAMOTO MAKOTO (JP)
Application Number:
PCT/JP2013/055156
Publication Date:
October 10, 2013
Filing Date:
February 27, 2013
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
B65G1/00; B65G1/04; H01L21/677
Foreign References:
| JP2001127134A | 2001-05-11 | |||
| JPH09315521A | 1997-12-09 | |||
| JPH10261685A | 1998-09-29 | |||
| JP2001213588A | 2001-08-07 | |||
| JP2004327575A | 2004-11-18 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
Download PDF: