Title:
COOLING DEVICE, EXPOSURE DEVICE EQUIPPED WITH COOLING DEVICE, AND INDUSTRIAL MACHINE EQUIPPED WITH COOLING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/230463
Kind Code:
A1
Abstract:
A cooling device (1) equipped with: a compressor (2) for compressing a refrigerant; a branch point (7) that is arranged downstream from the compressor (2) and that divides the compressed refrigerant into a first flow path and a second flow path; a condenser (3) that is arranged downstream from the branch point (7) in the first flow path and that condenses the compressed refrigerant; a first pressure reducer (4) that is arranged downstream from the condenser (3) and that decompresses the condensed refrigerant; a plurality of evaporators (5a, 5b, and 5c) that are arranged downstream from the first pressure reducer (4) and that are connected in series such that each cools a different cooling subject; a second pressure reducer (11) that is arranged downstream from the branch point (7) in the second flow path and that decompresses the compressed refrigerant; a hot gas flow path (9) that connects an outflow opening of the second pressure reducer (11) and a convergence point (8) located upstream from the downstreammost evaporator (5c) among the plurality of evaporators; a return flow path (13) that returns the refrigerant flowing from the downstreammost evaporator (5c) among the plurality of evaporators to the compressor; a first temperature detection means (10) that detects the temperature of the cooling subject cooled by the downstreammost evaporator (5c) among the plurality of evaporators; and a control unit (12). The control unit (12) controls the degree of opening of the second pressure reducer (11) on the basis of the temperature detected by the first temperature detection means (10).
Inventors:
ISHIHAMA HITOSHI (JP)
NAGATA MASAKAZU (JP)
SUZUKI YUUSUKE (JP)
NAGATA MASAKAZU (JP)
SUZUKI YUUSUKE (JP)
Application Number:
PCT/JP2019/019811
Publication Date:
December 05, 2019
Filing Date:
May 17, 2019
Export Citation:
Assignee:
CANON SEMICONDUCTOR EQUIPMENT INC (JP)
International Classes:
F25B1/00; F25B5/04; F25B39/02; G03F7/20
Foreign References:
| CN201355150Y | 2009-12-02 | |||
| JP2018004169A | 2018-01-11 | |||
| CN203642421U | 2014-06-11 | |||
| JP2015158305A | 2015-09-03 | |||
| JP2000028208A | 2000-01-28 | |||
| JP2008501927A | 2008-01-24 | |||
| JP2010145036A | 2010-07-01 | |||
| US5183101A | 1993-02-02 |
Attorney, Agent or Firm:
CHIKASHIMA,Kazuo et al. (JP)
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