Title:
COPPER CRYSTAL PARTICLES HAVING HIGHLY PREFERRED ORIENTATION AND PREPARATION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/095132
Kind Code:
A1
Abstract:
An electroplating copper layer includes bamboo-like copper crystal particles having a highly preferred orientation. The bamboo-like copper crystal particles have a long axis direction and a short axis direction, and the bamboo-like copper crystal particles have a length of 20 nm to 5 μm in the long axis direction and a length of 20 nm to 2 μm in the short axis direction. A method of preparing the bamboo-like copper crystal particles is also disclosed.
Inventors:
ZHANG YUN (CN)
WANG JING (CN)
ZHU ZIFANG (CN)
MA TAO (CN)
CHEN LUMING (CN)
WANG JING (CN)
ZHU ZIFANG (CN)
MA TAO (CN)
CHEN LUMING (CN)
Application Number:
PCT/CN2017/103498
Publication Date:
May 31, 2018
Filing Date:
September 26, 2017
Export Citation:
Assignee:
SUZHOU SHINHAO MAT LLC (CN)
International Classes:
C07D311/84; C25D3/38
Foreign References:
| CN105026385A | 2015-11-04 | |||
| US20010015321A1 | 2001-08-23 | |||
| US20050014317A1 | 2005-01-20 | |||
| CA2465363A1 | 2004-02-26 | |||
| US20030221966A1 | 2003-12-04 | |||
| CN1940146A | 2007-04-04 | |||
| CN102953097A | 2013-03-06 |
Attorney, Agent or Firm:
CHINABLE IP (CN)
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