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Title:
CORROSION-PROOF PRESSURE TRANSDUCER
Document Type and Number:
WIPO Patent Application WO2003031687
Kind Code:
B1
Abstract:
A corrosion proof pressure transducer for measuring exhaust gas pressure includes a chip (42) with a semiconductive diaphragm, electronics, and conductive pads (46) thereon; with leads (48) sonically bonded to the pads. To preclude degradation of the transducer by internal combustion engine exhaust gases, the chip may have a thin glass passivation layer, a vacuum deposited polymeric coating and a layer of gel, thereon.

Inventors:
PARK KYONG M
NASSAR MARCOS A
Application Number:
PCT/US2002/032551
Publication Date:
December 24, 2003
Filing Date:
October 11, 2002
Export Citation:
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Assignee:
KAVLICO CORP (US)
International Classes:
G01L23/24; F02B77/08; G01L19/06; G01M15/10; H01L29/84; G01L9/00; (IPC1-7): G01L9/00; G01L9/16
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