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Title:
CORROSION-RESISTANT MEMBER
Document Type and Number:
WIPO Patent Application WO/2021/065327
Kind Code:
A1
Abstract:
Provided is a corrosion-resistant member, a corrosion-resistant coating of which is difficult to peel from a base material even when subjected to a heat history. The corrosion-resistant member comprises: a metal base material (10); and a corrosion-resistant coating (30) formed on the surface of the base material (10). The corrosion-resistant coating (30) is obtained by stacking, from the base material (10) side: a magnesium fluoride layer (31) containing magnesium fluoride; and an aluminum fluoride layer (32) containing aluminum fluoride. The aluminum fluoride layer (32) is obtained by stacking, from the magnesium fluoride layer (31) side: a first crystalline layer (32A) which contains crystalline aluminum fluoride; a non-crystalline layer (32B) which contains non-crystalline aluminum fluoride; and a second crystalline layer (32C) which contains crystalline aluminum fluoride. The first crystalline layer (32A) and the second crystalline layer (32C) are layers in which diffraction spots are observed in an electron beam diffraction image, and the non-crystalline layer (32B) is a layer in which a halo pattern is observed in the electron beam diffraction image.

Inventors:
MIYAISHI SO (JP)
OKUBO MASAHIRO (JP)
YOSHIMURA MASAYUKI (JP)
SAKANE WATARU (JP)
TANAKA TEPPEI (JP)
NAKAMURA SAEKO (JP)
YAMAKI SAORI (JP)
Application Number:
JP2020/033461
Publication Date:
April 08, 2021
Filing Date:
September 03, 2020
Export Citation:
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Assignee:
SHOWA DENKO KK (JP)
International Classes:
C23C14/06; C01F5/28; C01F7/50; C23C26/00; C30B29/12; H01L21/3065
Attorney, Agent or Firm:
TANAKA Hidetetsu et al. (Shiroyama Trust Tower 32F 3-1, Toranomon 4-chome, Minato-k, Tokyo 32, JP)
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