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Title:
COUPLING STRUCTURE AND MANUFACTURING PROCESS FOR SOLIDLY MOUNTED RESONATOR
Document Type and Number:
WIPO Patent Application WO/2021/232530
Kind Code:
A1
Abstract:
A coupling structure and manufacturing process for a solidly mounted resonator. The solidly mounted resonator comprises a resonant functional layer (131) formed by a lower electrode layer (112), a piezoelectric layer (113) and an upper electrode layer (114) that are sequentially stacked. The coupling structure comprises a coupling bridge (311) provided between two adjacent solidly mounted resonators, and a cavity (411) is formed between the coupling bridge (311) and the piezoelectric layer (113). The projection region of the cavity (411) on the piezoelectric layer (113) at least covers an edge of the lower electrode layer (112). The solidly mounted resonator has excellent characteristics of a BAW, can effectively inhibit adverse effects caused by parasitics generated when devices are interconnected, and also has characteristics of shielding external and internal electromagnetic interferences and of heat dissipation, enabling a filter to have good resonance performance and electromagnetic shielding performance.

Inventors:
LI, Linping (CN)
SHENG, Jinghao (CN)
JIANG, Zhou (CN)
Application Number:
PCT/CN2020/097810
Publication Date:
November 25, 2021
Filing Date:
June 23, 2020
Export Citation:
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Assignee:
HANGZHOU JWL TECHNOLOGY INC. (CN)
International Classes:
H03H3/02
Attorney, Agent or Firm:
XIAMEN FEBE INTELLECTUAL PROPERTY AGENCY GP (CN)
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