Title:
COVER PLATE BEARING DEVICE, COVER PLATE CLEANING DEVICE, AND COVER PLATE CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/127271
Kind Code:
A1
Abstract:
Disclosed are a cover plate bearing device, a cover plate cleaning device, and a cover plate cleaning method. The cover plate bearing device (2) comprises a body (21) and a gas passage (22) provided on the body (21); the body (21) comprises two side walls raised separately along a first direction, a bottom wall (212) connected to the side walls (211), and an accommodating cavity (213) defined by the side walls and bottom wall; the shape of the accommodating cavity (213) matches that of a curved cover plate (1); gas outlets (221) of the gas passage (22) are provided in the side walls (211); and the gas passage (22) is used for blowing out gas at a preset angle to the side of the side walls (211) facing away from the bottom wall (212) to prevent erosion of moving fluids to a functional coating on the curved cover plate.
Inventors:
GAO GUANGBIN (CN)
Application Number:
PCT/CN2021/121074
Publication Date:
June 23, 2022
Filing Date:
September 27, 2021
Export Citation:
Assignee:
BAZHOU YUNGU ELECTRONICS TECH CO LTD (CN)
International Classes:
B08B7/00; H01L21/67
Foreign References:
| CN108189521A | 2018-06-22 | |||
| CN111883467A | 2020-11-03 | |||
| CN109365411A | 2019-02-22 | |||
| CN112620254A | 2021-04-09 | |||
| CN208962640U | 2019-06-11 | |||
| CN210047066U | 2020-02-11 | |||
| CN203125384U | 2013-08-14 | |||
| US5882414A | 1999-03-16 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
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