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Title:
CRYOGENIC REFRIGERATOR AND HEAT FLOW METER
Document Type and Number:
WIPO Patent Application WO/2022/124162
Kind Code:
A1
Abstract:
This cryogenic refrigerator (20) comprises: a first cooling stage (22a) that has a low temperature-side heat transfer member (50) and a high temperature-side heat transfer member (52) which are disposed separately from one another and a thermal resistance member (54) which connects the low temperature-side heat transfer member (50) and the high temperature-side heat transfer member (52) and mediates the thermal contact between the low temperature-side heat transfer member (50) and the high temperature-side heat transfer member (52); a low temperature-side temperature sensor (56) that is attached to the low temperature-side heat transfer member (50) and measures the temperature of the low temperature-side heat transfer member (50); and a high temperature-side temperature sensor (58) that is attached to the high temperature-side heat transfer member (52) and measures the temperature of the high temperature-side heat transfer member (52).

Inventors:
DEMURA KENTA (JP)
Application Number:
PCT/JP2021/044121
Publication Date:
June 16, 2022
Filing Date:
December 01, 2021
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
F25B9/00; H01L39/04
Foreign References:
JP2012209381A2012-10-25
JP2006038314A2006-02-09
JPH02282667A1990-11-20
JP2000097512A2000-04-04
JP2005121323A2005-05-12
JP2017511463A2017-04-20
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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