Title:
CURABLE COMPOSITION FOR IMPRINTING USE, AND REPLICA MOLD AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2018/173930
Kind Code:
A1
Abstract:
Provided are: a curable composition for imprinting use, which can be formed into a cured article layer for replica molds which has excellent adhesion to a mold base material and also has excellent mold release properties from a cured product of a material to be transferred when used in an imprinting method; a replica mold for imprinting use, which is produced using the curable composition for imprinting use; a method for producing the replica mold for imprinting use; and a method for producing an article having a fine pattern formed on the surface thereof, which is produced using the replica mold. A curable composition for imprinting use is used, which contains a fluorinated polymer having a constituent unit (a) based on the structure CH2=C(R1)C(O)OR2Rf (R1: a hydrogen atom, a methyl group, or the like; R2: a bivalent linking group having no fluorine atom; and Rf: a fluoroalkyl group having 2 to 6 carbon atoms, or the like) and a constituent unit (b) having a cation-polymerizable group having an oxygen atom and a photo-acid generator, wherein the content of the fluorinated polymer is 11 to 89% by mass relative to 100% by mass of the curable composition for imprinting use.
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Inventors:
TAKAGI KEISUKE (JP)
SAKURADA TOMOAKI (JP)
SAKURADA TOMOAKI (JP)
Application Number:
PCT/JP2018/010300
Publication Date:
September 27, 2018
Filing Date:
March 15, 2018
Export Citation:
Assignee:
AGC INC (JP)
International Classes:
H01L21/027; B29C33/38; B29C59/02; C08F2/48; C08F220/18; C08F220/24
Domestic Patent References:
| WO2006114958A1 | 2006-11-02 | |||
| WO2008155928A1 | 2008-12-24 |
Foreign References:
| JP2007001250A | 2007-01-11 | |||
| JP2010041025A | 2010-02-18 | |||
| JP5315263B2 | 2013-10-16 | |||
| JP2012109514A | 2012-06-07 | |||
| JP2012236999A | 2012-12-06 |
Attorney, Agent or Firm:
SENMYO Kenji et al. (JP)
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