Title:
CUTTING DEVICE AND CUTTING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/013837
Kind Code:
A1
Abstract:
A cutting device is provided with a first flange and a second flange secured to a rotary shaft in such a state as to sandwich a rotary blade. The first flange is provided with an annular holding part in close contact at the outer-peripheral portion thereof with a first surface of the rotary blade, and an annular first recess. The second flange is provided with an annular holding part in close contact at the outer-peripheral portion thereof with a second surface of the rotary blade, and an annular second recess. The first recess and the second recess are disposed facing each other with the rotary blade therebetween. The distance from the first surface to the inner bottom surface of the first recess and the distance from the second surface to the inner bottom surface of the second recess are set so as to be greater than the maximum size of abrasive grains of the rotary blade, less than the maximum amount of deformation within the permissible range of deformation of the rotary blade, and equal to each other. When the rotary blade deforms, the abrasive grains come into contact with the first recess and second recess.
Inventors:
YAMAMOTO MASAYUKI (JP)
FUKAI MOTOKI (JP)
ISHIBASHI KANJI (JP)
FUKAI MOTOKI (JP)
ISHIBASHI KANJI (JP)
Application Number:
PCT/JP2016/003101
Publication Date:
January 26, 2017
Filing Date:
June 28, 2016
Export Citation:
Assignee:
TOWA CORP (JP)
International Classes:
B24B27/06; B24B45/00; B24D5/16; B26D1/14; B28D1/24; H01L21/301
Foreign References:
| JP2011255458A | 2011-12-22 | |||
| JP2005324438A | 2005-11-24 | |||
| JP2004358605A | 2004-12-24 | |||
| JP2015085466A | 2015-05-07 | |||
| JP2000202770A | 2000-07-25 |
Attorney, Agent or Firm:
OKADA, Kazuhide (JP)
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