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Patent Searching and Data


Title:
CUTTING DEVICE, SENSOR UNIT, AND DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/040142
Kind Code:
A1
Abstract:
Provided is a cutting device with which it is possible to precisely and easily detect rattling of a blade. The present invention has: a table on which an object is placed; a cutting part having a blade for cutting the object, and a rotation drive part for causing the blade to rotate; and a first photoelectric detection part for detecting the position of an edge portion of the blade, the first photoelectric detection part having a Z-axis movement mechanism for causing the table or the cutting part to move in a Z-axis direction in which the distance between a placement surface and a rotational axis changes, an X-axis movement mechanism for causing the table or the cutting part to move in an X-axis direction, a first emission part for emitting light, and a first incidence part disposed so as to sandwich the edge portion of the blade together with the first emission part, the light emitted by the first emission part being incident on the first incidence part. A first detection axis connecting the first emission part and the first incidence part intersects an inclined direction with respect to the rotating surface of the blade.

Inventors:
NAOI KATSUO (JP)
TSUDA HIROSHI (JP)
JOJI TATSUO (JP)
Application Number:
PCT/JP2019/032459
Publication Date:
February 27, 2020
Filing Date:
August 20, 2019
Export Citation:
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Assignee:
TDK CORP (JP)
International Classes:
B24B27/06; B24B49/12; H01L21/301
Foreign References:
JP2012040651A2012-03-01
JPH0388345U1991-09-10
JP2006116690A2006-05-11
JP2009206363A2009-09-10
JP2005028479A2005-02-03
JP2012169557A2012-09-06
JP2006294641A2006-10-26
Attorney, Agent or Firm:
MAEDA & SUZUKI (JP)
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