Title:
CVD PRECURSOR SOLUTION USED FOR PRODUCTION OF A THIN FILM COMPRISING A LANTHANIDE SERIES METAL AND A THIN FILM PRODUCING METHOD USING THE SAME
Document Type and Number:
WIPO Patent Application WO2006021850
Kind Code:
A3
Abstract:
To obtain a lanthanide series multi-metal oxide thin film containing plural components, wherein the desired composition of the film is achieved constantly, a CVD precursor used for production of a thin film comprising one or more lanthanide series metals and one or more metals other than a lanthanide series metal, which is obtained by dissolving a compound represented by "Ln(ß-dik)3 L" (wherein, Ln is the lanthanide series metal atom, ß-dik is preferably selected from a group of dipivaloylmethane ligand (DPM), diisobutyrylmethane ligand (DIBM), isobutyrylpivaloylmethane ligand (IBPM), 2,2,6,6-tetramethyl-3, 5-octanedione ligand (TMOD), acetylacetone ligand, 6-ethyl-2,2-dimethyl-3,5-octanedione ligand, 5methyl-2,4-hexanedione ligand and 5,5-dimethyl-2,4hexanedione ligand, L is a neutral ligand preferably selected from a group of 1,10-phenanthroline, 2,2'-bipyridyl and their derivatives), and an organometallic complex containing a metal other than the lanthanide series in a solvent, wherein a OTG curve obtained by thermogravimetric analysis (TG) of the compound represented by the formula (I) has a single peak of a vaporization point.
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Inventors:
TASAKI YUZO (JP)
YOSHIZAWA SHUJI (JP)
YOSHIZAWA SHUJI (JP)
Application Number:
PCT/IB2005/002397
Publication Date:
October 26, 2006
Filing Date:
August 10, 2005
Export Citation:
Assignee:
TOSHIMA MFG CO LTD (JP)
GETTERS SPA (IT)
TASAKI YUZO (JP)
YOSHIZAWA SHUJI (JP)
GETTERS SPA (IT)
TASAKI YUZO (JP)
YOSHIZAWA SHUJI (JP)
International Classes:
C23C16/40; C07F5/00
Domestic Patent References:
| WO1996040690A1 | 1996-12-19 | |||
| WO1999000530A1 | 1999-01-07 | |||
| WO1999027030A1 | 1999-06-03 |
Foreign References:
| US5837321A | 1998-11-17 |
Other References:
ZOAN T A ET AL: "Synthesis, structure and properties of volatile lanthanide pivalates", JOURNAL OF ALLOYS AND COMPOUNDS, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 225, 15 July 1995 (1995-07-15), pages 396 - 399, XP004072043, ISSN: 0925-8388
MORAIS C R S ET AL: "Kinetic study of the thermal decomposition of Eu<3+> with beta-diketone ligands and 1,10-phenanthroline or 2,2-dipyridine", JOURNAL OF ALLOYS AND COMPOUNDS, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 344, no. 1-2, 7 October 2002 (2002-10-07), pages 101 - 104, XP004387044, ISSN: 0925-8388
BARBILLAT J ET AL: "Near-infrared Fourier transform room-temperature photoluminescence of erbium complexes", REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS, US, vol. 74, no. 11, November 2003 (2003-11-01), pages 4954 - 4957, XP012060685, ISSN: 0034-6748
ZHONG X L ET AL: "Electrical properties of Nd-substituted Bi4Ti3O12 thin films fabricated by chemical solution deposition", JOURNAL OF CRYSTAL GROWTH, ELSEVIER, AMSTERDAM, NL, vol. 277, no. 1-4, 15 April 2005 (2005-04-15), pages 233 - 237, XP004831639, ISSN: 0022-0248
MORAIS C R S ET AL: "Kinetic study of the thermal decomposition of Eu<3+> with beta-diketone ligands and 1,10-phenanthroline or 2,2-dipyridine", JOURNAL OF ALLOYS AND COMPOUNDS, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 344, no. 1-2, 7 October 2002 (2002-10-07), pages 101 - 104, XP004387044, ISSN: 0925-8388
BARBILLAT J ET AL: "Near-infrared Fourier transform room-temperature photoluminescence of erbium complexes", REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS, US, vol. 74, no. 11, November 2003 (2003-11-01), pages 4954 - 4957, XP012060685, ISSN: 0034-6748
ZHONG X L ET AL: "Electrical properties of Nd-substituted Bi4Ti3O12 thin films fabricated by chemical solution deposition", JOURNAL OF CRYSTAL GROWTH, ELSEVIER, AMSTERDAM, NL, vol. 277, no. 1-4, 15 April 2005 (2005-04-15), pages 233 - 237, XP004831639, ISSN: 0022-0248
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