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Title:
DATA EVALUATION DEVICE AND DATA EVALUATION METHOD FOR OPTICAL MEASUREMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/122850
Kind Code:
A1
Abstract:
The present invention relates to a data evaluation device and a data evaluation method for an optical measurement apparatus, the device and the method being capable of ensuring quality reliability for measurement data by evaluating measurement data according to the measurement of an object by the optical measurement apparatus having a measurement member, which measures the object loaded on a surface plate while moving on a gantry. To this end, the data evaluation method for the optical measurement apparatus comprises: a data storage unit for storing measurement data transferred from the measurement member with respect to a measurement section, and residual vibration remaining on the surface plate and being linked to the measurement data; a data comparison unit for comparing the measurement data stored in the data storage unit; a vibration comparison unit for comparing the residual vibration, stored in the data storage unit and being linked to the measurement data exceeding an error range, with other residual vibration stored in the data storage unit, or comparing the residual vibration, stored in the data storage unit and being linked to the measurement data exceeding the error range, with a preset reference vibration, when the measurement data, which is compared through the data comparison unit and is among the measurement data stored in the data storage unit, exceeds the error range; and an error informing unit for displaying error information of the measurement data when the residual vibration having passed through the vibration comparison unit and generated from the surface plate exceeds the error range.

Inventors:
KIM TAE WOOK (KR)
LEE JUN HYEOK (KR)
PAHK HEUI JAE (KR)
Application Number:
PCT/KR2016/000451
Publication Date:
July 20, 2017
Filing Date:
January 15, 2016
Export Citation:
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Assignee:
SNU PRECISION CO LTD (KR)
International Classes:
G01B9/02; F16F15/02; G01B11/24; G01H17/00
Domestic Patent References:
WO2011059003A12011-05-19
Foreign References:
JP2009186330A2009-08-20
KR20140009769A2014-01-23
US20090224777A12009-09-10
KR20070057787A2007-06-07
Attorney, Agent or Firm:
AHN, Joon-Hyung (KR)
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