Title:
DC HIGH-VOLTAGE SOURCE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/018873
Kind Code:
A1
Abstract:
This DC high-voltage source device comprises a first voltage source including: a first variable DC voltage source; a second variable DC voltage source; a first switching circuit that generates an AC voltage from the DC voltage of the first variable DC voltage source; a second switching circuit that generates an AC voltage from the DC voltage of the second variable DC voltage source; a first transformer that transforms the AC voltage generated by the first switching circuit; a second transformer that transforms the AC voltage generated by the second switching circuit; a DC high-voltage generation circuit that generates a DC high voltage on the basis of a transformed AC voltage supplied from the first transformer and a transformed AC voltage supplied from the second transformer; and a computer system. The computer system independently adjusts the DC voltage value of the first variable DC voltage source, the DC voltage value of the second variable DC voltage source, the switching timing of the first switching circuit, and the switching timing of the second switching circuit.
Inventors:
SASAKI TOMOYO (JP)
Application Number:
PCT/JP2020/028562
Publication Date:
January 27, 2022
Filing Date:
July 22, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H02M3/07; H01J37/248; H02M3/28
Foreign References:
| JP2012155857A | 2012-08-16 | |||
| JP2004135363A | 2004-04-30 | |||
| JPH0670492U | 1994-09-30 | |||
| JP2008269915A | 2008-11-06 | |||
| JP2017158277A | 2017-09-07 | |||
| JP2007236099A | 2007-09-13 | |||
| JP2005294004A | 2005-10-20 | |||
| JP2007037268A | 2007-02-08 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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