DEEP ULTRAVIOLET LED DEVICE AND METHOD FOR MANUFACTURING SAME

WIPO Patent Application WO/2020/040304

A1

Provided is a deep ultraviolet LED device comprising: a surface mount-type aluminum nitride ceramic package in which an inorganic coating film having a reflectivity of at least 91% at a deep ultraviolet LED element design wavelength λ (200-355 nm) is coated on the inner bottom surface and inner side walls thereof, the inner side wall angle thereof is 45-60 degrees, and the outermost surface thereof is sealed with a quartz window; and a deep ultraviolet LED element mounted in the package, wherein the deep ultraviolet LED element has a reflective electrode layer (Au), a metal layer (Ni), a p-type GaN contact layer, a p-type AlGaN layer, a multi-quantum barrier layer (or electron block layer), a multi-quantum well layer, an n-type AlGaN layer, an AlN buffer layer, and a sapphire substrate in this order from the opposite side from the sapphire substrate, and has a reflective two-dimensional photonic crystal which is located within the range of the metal layer and the p-type GaN contact layer in the thickness direction and which has a plurality vacancies disposed in locations that are not beyond the boundaries of the p-type GaN contact layer and the p-type AlGaN layer. The periodic structure of the reflective two-dimensional photonic crystal has a photonic band gap that opens to a TE-polarized component, wherein the period a of the reflective two-dimensional photonic crystal periodic structure satisfies the Bragg condition for light having the design wavelength λ, the order m in the Bragg equation, mλ/neff=2a (m: order, λ: design wavelength, neff: effective refractive index of two-dimensional photonic crystal, and a: period of two-dimensional photonic crystal) satisfies 3≤m≤4, and the ratio of R/a (R is the radius of the vacancies) satisfies 0.30≤R/a≤0.40.

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KASHIMA YUKIO (JP)
MATSUURA ERIKO (JP)
KOKUBO MITSUNORI (JP)
TASHIRO TAKAHARU (JP)
HIRAYAMA HIDEKI (JP)
MAEDA NORITOSHI (JP)
KAMIMURA RYUICHIRO (JP)
OSADA YAMATO (JP)
FURUTA KANJI (JP)
IWAI TAKESHI (JP)
AOYAMA YOHEI (JP)
IWAISAKO YASUSHI (JP)
NAGANO TSUGUMI (JP)
TAKAGI HIDEKI (JP)
KURASHIMA YUUICHI (JP)
MATSUMAE TAKASHI (JP)

PCT/JP2019/033110

February 27, 2020

August 23, 2019

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MARUBUN CO LTD (JP)
TOSHIBA MACHINE CO LTD (JP)
RIKEN (JP)
ULVAC INC (JP)
TOKYO OHKA KOGYO CO LTD (JP)
NIPPON TUNGSTEN (JP)
DAINIPPON PRINTING CO LTD (JP)
AIST (JP)

H01L33/60; H01L33/22; H01L33/32; H01L33/36; H01L33/58

WO2017168811A1	2017-10-05
WO2017038961A1	2017-03-09
WO2006013899A1	2006-02-09

JP2005317596A	2005-11-10
JP2012244170A	2012-12-10
JP2013042079A	2013-02-28
JP2017117982A	2017-06-29
US20100259930A1	2010-10-14
US20050093116A1	2005-05-05

HIRAKI & ASSOCIATES (JP)

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