Title:
DEFECT INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/162881
Kind Code:
A1
Abstract:
A defect inspection device in which the optical axis of a detection optical system is angled relative to a sample surface, and which is angled relative to the optical axis of the detection optical system in a manner such that the long axis of the light-receiving surface of an imaging sensor matches a conjugate location to the illuminated spot on the sample surface, said defect inspection device being configured so as to: calculate a height change amount of the illuminated spot in the normal direction to the surface of the sample, on the basis of the output from a height measurement unit; calculate the amount of offset of a focal position relative to the light-receiving surface in the direction of the optical axis of the detection optical system which occurs due to the illuminated spot height change, on the basis of the illuminated spot height change amount; controls a focus actuator on the basis of the focal position offset amount; aligns the focal position to the light-receiving surface of the imaging sensor; and calculates the scattered light intensities at the same coordinates on the sample between a plurality of data sets for the optical images outputted from a plurality of imaging sensors or between a plurality of data sets for the optical images outputted from the same imaging sensor when scanning the illuminated spot.
Inventors:
YAMAKAWA HIROMICHI (JP)
HONDA TOSHIFUMI (JP)
URANO YUTA (JP)
MATSUMOTO SHUNICHI (JP)
YAMAMOTO MASAYA (JP)
ARIMA EIJI (JP)
HONDA TOSHIFUMI (JP)
URANO YUTA (JP)
MATSUMOTO SHUNICHI (JP)
YAMAMOTO MASAYA (JP)
ARIMA EIJI (JP)
Application Number:
PCT/JP2021/003285
Publication Date:
August 04, 2022
Filing Date:
January 29, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N21/956; H01L21/66
Domestic Patent References:
| WO2007110672A1 | 2007-10-04 | |||
| WO2020136697A1 | 2020-07-02 | |||
| WO2021029025A1 | 2021-02-18 | |||
| WO2021024319A1 | 2021-02-11 |
Foreign References:
| JP2012137350A | 2012-07-19 | |||
| JP2009053132A | 2009-03-12 | |||
| JP2015028457A | 2015-02-12 |
Attorney, Agent or Firm:
KAICHI IP (JP)
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