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Patent Searching and Data


Title:
DEPOSITION DEVICE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/256241
Kind Code:
A1
Abstract:
A deposition device system according to one embodiment of the present invention can comprise: a vacuum chamber; at least one viewport provided on one surface of the vacuum chamber; a deposition device including a crucible which is accommodated in the vacuum chamber and in which a deposition raw material is accommodated, a heater unit for heating the crucible, and at least one nozzle through which a deposition material evaporated from the deposition raw material passes; a camera which is positioned outside the viewport and which photographs the nozzle through the viewport; a laser which is positioned outside the viewport, and which outputs a laser beam toward the nozzle through the viewport; a laser moving means for moving, toward one point of the nozzle, the laser beam outputted from the laser; and a control part for receiving a nozzle image captured by the camera, and controlling the operations of the laser and the laser moving means according to the result of having sensed clogging in the nozzle image.

Inventors:
CHOI KUNHOON (KR)
SHIN DAESEONG (KR)
KIM SEUNGYEON (KR)
HONG HUNHO (KR)
Application Number:
PCT/KR2019/016782
Publication Date:
December 24, 2020
Filing Date:
November 29, 2019
Export Citation:
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Assignee:
LG ELECTRONICS INC (KR)
International Classes:
C23C14/24; B05B15/14; B05B15/52; C23C14/12; C23C14/52; C23C14/54; C23C14/56
Foreign References:
KR20190014032A2019-02-11
KR20110009059A2011-01-27
JP2010215981A2010-09-30
JPH10121243A1998-05-12
KR20180098428A2018-09-04
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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