Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DEVICE FOR MEASURING LINEAR DIMENSIONS ON A STRUCTURED SURFACE OF AN OBJECT
Document Type and Number:
WIPO Patent Application WO1992008946
Kind Code:
A3
Abstract:
Proposed is a device designed to measure linear dimensions on the structured surface (6) of an object (7), a pointed sensor tip (5) touching the surface (6) being fixed to a resonator (4) which is moved parallel to the surface (6) and whose position is determined using ordinary distance-measuring systems. In addition, the resonator (4) is connected to a processing circuit designed to detect resonance changes and to a subsequent control circuit (10) which is connected to position-control elements (2, 3) acting on the resonator (4) in a direction perpendicular to the surface (6). A phase-measurement circuit (9) is used as the processing circuit, the inputs to this circuit being connected to electrodes which are attached to the resonator (4).

Inventors:
BARTZKE KARLHEINZ (DE)
THIEMER ROLF (DE)
MENDE ERHARD (DE)
ZIESEMANN MANFRED (DE)
FRITZSCH LUDWIG (DE)
SEYDEL EBERHARD (DE)
HEIM JOACHIM (DE)
WEIHNACHT MANFRED (DE)
HOFFMANN BURKHARD (DE)
Application Number:
PCT/EP1991/002088
Publication Date:
July 23, 1992
Filing Date:
November 05, 1991
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
JENOPTIK JENA GMBH (DE)
International Classes:
G01B7/28; G01B7/34; (IPC1-7): G01B7/34; G01N27/00
Domestic Patent References:
WO1989000672A11989-01-26
Foreign References:
EP0290647A11988-11-17
EP0338083A11989-10-25
CH667835A51988-11-15
Other References:
INTERNATIONAL JOURNAL OF ELECTRONICS, Band 68, Nr. 1, 1. Januar 1990 (London, GB) M. Ahmad: "Measurement of power system frequency deviation using a microprocessor", Seiten 161-164, siehe Abschnitt 2; Figur 1
APPLIED PHYSICS LETTERS. Band 55, Nr. 22, 27. November 1989, (New York, US) P.C.D. Hobbs et al.: "Magnetic force microscopy with 25nm resolution", Seiten 2357-2359, siehe Seite 2357, linke Spalte, Abschnitt 2 - Seite 2358, rechte Spalte, Abschnitt 1; Figur 1
IBM TECHNICAL DISCLOSURE BULLETIN, Band 32, Nr. 88, 1. Januar 1990 (New York, US) "Combined scanning tunneling and capacitance microscope", Seiten 266-267
Download PDF: