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Title:
DEVICE FOR REALIZING SURFACE CLEANING OF OPTICAL ELEMENT BYION WIND AND ELECTROSTATIC COUPLING
Document Type and Number:
WIPO Patent Application WO/2021/147656
Kind Code:
A1
Abstract:
A device for realizing surface cleaning of an optical element by ion wind and electrostatic coupling, comprising a fixing support (1), an optical element (2), an ion wind system (3), an electrostatic adsorption system (4), and a particle contaminant storage box (5); the ion wind system (3) comprises an air knife (6), an ion bar (9), an ion bar support (7), a connecting sheet (10), and a three-degree-of-freedom combined displacement stage (8); the electrostatic adsorption system (4) comprises rod-shaped electrodes (12, 13), electrode fixing supports (11-1, 11-2, 11-3) and a manual displacement stage (14); the particle contaminant storage box (5) is connected to a working surface (1-1) by means of storage box supports (15), and an included angle between the particle contaminant storage box (5) and the storage box supports (15) is 135 degrees.

Inventors:
BAI QINGSHUN (CN)
DOU YUHAO (CN)
ZHANG YICHEN (CN)
XIE CHENGHAO (CN)
NIU LONGFEI (CN)
MIAO XINXIANG (CN)
Application Number:
PCT/CN2021/070123
Publication Date:
July 29, 2021
Filing Date:
January 04, 2021
Export Citation:
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Assignee:
HARBIN INST TECHNOLOGY (CN)
International Classes:
B08B5/02; B03C3/04; B08B13/00
Domestic Patent References:
WO2010109261A12010-09-30
Foreign References:
CN111229727A2020-06-05
CN110813924A2020-02-21
CN103212553A2013-07-24
CN204523683U2015-08-05
CN206334917U2017-07-18
Attorney, Agent or Firm:
HARBIN LONGKE PATENT AGENCY CO., LTD (CN)
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