Title:
DIAMOND AND PREPARATION METHOD AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2022/095301
Kind Code:
A1
Abstract:
Disclosed are diamond and a preparation method and application thereof. The preparation method for the diamond comprises: (1) treating a substrate material of a substrate table to obtain a surface easily separated from a diamond film; (2) forming a diamond film layer on the surface of the substrate table by means of a plasma chemical vapor deposition method, wherein multiple energy sources are coupled to plasma in plasma chemical vapor deposition; and (3) performing post-treatment on the diamond film layer so as to remove impurity materials on the surface of the diamond and a nucleation layer and/or a stress layer having the performance inconsistent with the performance of a diamond film body. The whole process is comprehensively designed in the present invention, and particularly, the stable high-quality large-area diamond film is prepared by means of treatment of the substrate material of the substrate table in the early period, coupling of the multiple energy sources in the deposition process, and specific post-treatment. The method has the advantages of controllable thickness, controllable quality, controllable cost and the like, and lays a foundation for the diamond in the fields of cutters, heat sinks and the like.
Inventors:
MAN WEIDONG (CN)
ZHU CHANGZHENG (CN)
GONG CHUANG (CN)
WU JIANBO (CN)
JIANG JIANHONG (CN)
ZHU CHANGZHENG (CN)
GONG CHUANG (CN)
WU JIANBO (CN)
JIANG JIANHONG (CN)
Application Number:
PCT/CN2021/075505
Publication Date:
May 12, 2022
Filing Date:
February 05, 2021
Export Citation:
Assignee:
SHANGHAI ZHENGSHI TECH CO LTD (CN)
International Classes:
C23C16/27; B23K26/38; C01B32/26; C23C16/02; C23C16/511; C23C16/52; C23C16/56; F28F21/02
Foreign References:
| CN112030133A | 2020-12-04 | |||
| CN102251231A | 2011-11-23 | |||
| CN101235485A | 2008-08-06 | |||
| CN109911894A | 2019-06-21 | |||
| CN110808181A | 2020-02-18 | |||
| CN105779937A | 2016-07-20 | |||
| CN108570655A | 2018-09-25 | |||
| CN1341159A | 2002-03-20 | |||
| CN109234806A | 2019-01-18 | |||
| US6358839B1 | 2002-03-19 |
Attorney, Agent or Firm:
SUZHOU CREATOR PATENT AND TRADEMARK AGENCY, LTD (CN)
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