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Title:
DOPED BULK ACOUSTIC WAVE (BAW) RESONATOR STRUCTURES, DEVICES AND SYSTEMS
Document Type and Number:
WIPO Patent Application WO/2021/021730
Kind Code:
A3
Abstract:
Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including filters, oscillators and systems that may include such devices. A first layer of doped piezoelectric layer material and a second layer of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of doped piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. An acoustic reflector including a first pair of metal electrode layers may be electrically and acoustically coupled with the first layer of doped piezoelectric material and the second layer of piezoelectric material to excite the piezoelectrically excitable main resonance mode at a resonant frequency.

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Inventors:
BURAK DARIUSZ (US)
GRANNEN KEVIN J (US)
LENELL JACK (US)
Application Number:
PCT/US2020/043730
Publication Date:
March 11, 2021
Filing Date:
July 27, 2020
Export Citation:
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Assignee:
QXONIX INC (US)
International Classes:
B81B7/02; H03H9/02; H03H9/13; H03H9/15; H03H9/17; H03H9/54
Foreign References:
US20050012568A12005-01-20
US20140354109A12014-12-04
US20140111288A12014-04-24
US20150318837A12015-11-05
US20150318461A12015-11-05
US20120201174A12012-08-09
Attorney, Agent or Firm:
LENELL, Jack (US)
Download PDF:
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