Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DOUBLE-SIDED POLISHING DEVICE FOR WORKPIECE
Document Type and Number:
WIPO Patent Application WO/2019/198343
Kind Code:
A1
Abstract:
Provided is a double-sided polishing device for a workpiece that can perform double-sided polishing of the workpiece while maintaining accuracy, for a longer period of time than conventional devices, in measuring the thickness of the workpiece. In this double-sided polishing device 1, an upper surface plate 2 or a lower surface plate is provided with one or more through-holes 10 that penetrate from the top surface to the bottom surface of the upper surface plate 2 or the lower surface plate. A polishing pad 7 is provided with a hole 11 at a position corresponding to the through-hole 10. The double-sided polishing device 1 is further provided with a workpiece thickness measuring device that measures the thickness of a workpiece W while engaging in double-sided polishing of the workpiece W. The present invention is characterized in that: each of the one or more through-holes 10 has inserted therein a solid window member 13; the window member 13 comprises a cylindrical section 14 and a flange section 15 that has a larger diameter than the through-hole 10; a ring-shaped recess 14b is provided in a side surface 14a of the cylindrical section 14; and, in a state where an O-ring 16 is disposed in the ring-shaped recess 14b, the cylindrical section 14 is inserted into the through-hole 10 from the polishing pad 7 side.

Inventors:
KUBOTA MAMI (JP)
TAKANASHI KEIICHI (JP)
Application Number:
PCT/JP2019/005924
Publication Date:
October 17, 2019
Filing Date:
February 18, 2019
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SUMCO CORP (JP)
International Classes:
B24B37/013; B24B37/08; B24B49/12; H01L21/304
Foreign References:
JP2011249833A2011-12-08
JP2017052027A2017-03-16
US20030180973A12003-09-25
US20030205325A12003-11-06
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
Download PDF:



 
Previous Patent: X-RAY GENERATOR

Next Patent: IMAGE FORMATION DEVICE