Title:
DRIVE UNIT
Document Type and Number:
WIPO Patent Application WO/2011/055427
Kind Code:
A1
Abstract:
A drive unit comprises an electromagnet (6) which is capable of direct acting or rotating and generates a pre-pressure, a sliding guide (4) having a sliding guide surface (4a) abutting against the sliding surface (6a) of the electromagnet (6) and to which the pre-pressure is applied, a piezoelectric element (7) which applies vibration to the electromagnet (6) by using the inertial force of a table (8) mounting a positioning object (9), and a motor (5) which generates a driving force for driving the electromagnet (6)(movable portion (2)) in a predetermined direction so that the driving force becomes greater than the frictional force fFR_ON between the sliding surface (6a) and the sliding guide surface (4a) when the vibration is applied to the electromagnet (6), but becomes smaller than the frictional force fFR_OFF between the sliding surface (6a) and the sliding guide surface (4a) when the vibration is not applied to the electromagnet (6).
Inventors:
TAKAHASHI HIROSHI (JP)
NUKADA HIDEKI (JP)
NUKADA HIDEKI (JP)
Application Number:
PCT/JP2009/068825
Publication Date:
May 12, 2011
Filing Date:
November 04, 2009
Export Citation:
Assignee:
TOSHIBA KK (JP)
TAKAHASHI HIROSHI (JP)
NUKADA HIDEKI (JP)
TAKAHASHI HIROSHI (JP)
NUKADA HIDEKI (JP)
International Classes:
G12B5/00; G05D3/00
Foreign References:
JPH08126354A | 1996-05-17 | |||
JPS61246812A | 1986-11-04 | |||
JPH04207982A | 1992-07-29 | |||
JPS63136111A | 1988-06-08 |
Attorney, Agent or Firm:
YOSHITAKE Kenji et al. (JP)
Kenji Yoshitake (JP)
Kenji Yoshitake (JP)
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