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Patent Searching and Data


Title:
DRIVING APPARATUS, POSITIONING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/038094
Kind Code:
A1
Abstract:
A driving apparatus for driving a motor having a coil and a magnet, includes an electric current driver supplying electric current to the coil, and a controller generating electric current command value to be supplied to the electric current driver. The controller includes a first commutation computer (8) generating first electric current command value based on one of command value and calculated value obtained by calculating the command value, a second commutation computer (15) generating second electric current command value based on the command value, a correction value determinator (16) determining a correction value based on the second electric current command value, and a corrector (10) generating the electric current command value based on the first electric current command value and the correction value. When the electric current driver has transfer function of F(s), the correction value determinator (16) has transfer function of (F(s)-1-1).

Inventors:
HIRATA MITSUO (JP)
SUZUKI MASAYASU (JP)
MARUYAMA SATOSHI (JP)
Application Number:
PCT/JP2016/003978
Publication Date:
March 09, 2017
Filing Date:
August 31, 2016
Export Citation:
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Assignee:
CANON KK (JP)
UNIV UTSUNOMIYA (JP)
International Classes:
G03F7/20; G05D3/00
Domestic Patent References:
WO2015004885A12015-01-15
Foreign References:
JPH0375906A1991-03-29
JPS61169905A1986-07-31
US20130249447A12013-09-26
JP2012210067A2012-10-25
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (Kioicho Park Bldg. 3-6, Kioicho, Chiyoda-k, Tokyo 94, JP)
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