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Patent Searching and Data


Title:
DROPLET DELIVERY DEVICE, DROPLET DELIVERY METHOD, AND FUNCTIONAL LIQUID
Document Type and Number:
WIPO Patent Application WO/2021/079762
Kind Code:
A1
Abstract:
The droplet delivery device (1) according to an embodiment is equipped with a head (63) and a supply mechanism (7). The head (63) delivers a droplet of a functional liquid. The supply mechanism (7) supplies a functional liquid to the head (63). The solvent of the functional liquid is decided based on the degree of swelling with respect to the material of wetted members used in the head (63) or supply mechanism (7) and in contact with the functional liquid.

Inventors:
OGURA, Eiji (2381-1 Kitagejo, Fujii-cho, Nirasaki-sh, Yamanashi 11, JP)
OSHIMA, Kiyomi (2381-1 Kitagejo, Fujii-cho, Nirasaki-sh, Yamanashi 11, JP)
Application Number:
JP2020/038425
Publication Date:
April 29, 2021
Filing Date:
October 12, 2020
Export Citation:
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Assignee:
TOKYO ELECTRON LIMITED (Minato-ku Tokyo, 25, JP)
International Classes:
B05C11/10; B05D1/26; B05C5/00; B41J2/01; B41J2/165; G02B5/20; H01L27/32; H05B33/10; H01L51/50; H05B33/14
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (8-1 Kasumigaseki 3-chome, Chiyoda-k, Tokyo 13, JP)
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