Title:
DUST COLLECTING CLEANER HAVING INTERFERENCE AVOIDANCE STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2018/034363
Kind Code:
A8
Abstract:
The present invention relates to a dust collecting cleaner having an interference avoidance structure and, more particularly, to a dust collecting cleaner, having an interference avoidance structure, enabling removal of foreign materials in various forms generated during a surface treatment process for a substrate by means of an optical apparatus such as a laser. The dust collecting cleaner having an interference avoidance structure comprises: dust collecting housings (11a, 11b, 21) having open spaces (12, 22) formed on the central part thereof in the vertical direction with respect to an object to be treated; air knife units (15a, 15b, 25) disposed below the dust collecting housings (11a, 11b, 21); and a dust collecting path (DP) formed in front of the air knife units (15a, 15b, 25), wherein a gas flowing in and being sprayed from above the open space (12) and from the air knife units (15a, 15b, 25) flows into the dust collecting path (DP).
Inventors:
HWANG CHANG-BAE (KR)
Application Number:
PCT/KR2016/009090
Publication Date:
April 25, 2019
Filing Date:
August 18, 2016
Export Citation:
Assignee:
NTK CORP CO LTD (KR)
International Classes:
B08B15/00; B08B11/00; G02F1/13
Attorney, Agent or Firm:
YANG, Jeong-Kun (KR)
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