Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/025004
Kind Code:
A1
Abstract:
[Problem] To provide an elastic wave device with which it is possible to obtain good characteristics in ultra-high frequency bands of 6 GHz or higher, while maintaining sufficient mechanical strength. [Solution] An elastic wave device comprising: a piezoelectric substrate 11; an electrode 12 provided so as to adjoin the piezoelectric substrate 11; and an acoustic multilayer film 13 provided so as to adjoin the piezoelectric substrate 11 and/or the electrode 12. The elastic wave device is configured to utilize a high-order mode of the resonance characteristics of bulk waves. The acoustic multilayer film 13 has a low-acoustic impedance film 13a and a high-acoustic impedance film 13b which are laminated alternately.
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Inventors:
KADOTA MICHIO (JP)
TANAKA SHUJI (JP)
TANAKA SHUJI (JP)
Application Number:
PCT/JP2020/029759
Publication Date:
February 11, 2021
Filing Date:
August 04, 2020
Export Citation:
Assignee:
UNIV TOHOKU (JP)
International Classes:
H03H9/17
Domestic Patent References:
| WO2013031748A1 | 2013-03-07 |
Foreign References:
| JP2013528996A | 2013-07-11 | |||
| JP2005051447A | 2005-02-24 | |||
| JP2015502065A | 2015-01-19 | |||
| JP2013225945A | 2013-10-31 | |||
| JPH09162683A | 1997-06-20 | |||
| JP2018110317A | 2018-07-12 |
Attorney, Agent or Firm:
KUSUNOKI Shuji (JP)
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