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Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/060509
Kind Code:
A1
Abstract:
Even when progress is made on miniaturization, the present invention can increase a Q value and reduce size. This elastic wave device further includes a piezoelectric layer (4), a first electrode (51) and a second electrode (52), a first division resonator (RS3) and a second division resonator (RS4), and a support substrate (2). The support substrate (2) has a first energy confinement layer and a second energy confinement layer. The first energy confinement layer overlaps at least a part of a first region (451) of the piezoelectric layer (4). The second energy confinement layer overlaps at least a part of a second region (452) of the piezoelectric layer (4). In the support substrate (2), the first energy confinement layer and the second energy confinement layer are integrally formed.

Inventors:
YAMANE TAKASHI
NAGATOMO SHOU
KIMURA TETSUYA
Application Number:
PCT/JP2020/036397
Publication Date:
April 01, 2021
Filing Date:
September 25, 2020
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/17; H03H9/25
Domestic Patent References:
WO2019065666A12019-04-04
WO2016129662A12016-08-18
WO2018003297A12018-01-04
WO2015002047A12015-01-08
WO2016052129A12016-04-07
Foreign References:
JP2010233210A2010-10-14
JP2013528996A2013-07-11
JP2019092096A2019-06-13
JP2018007239A2018-01-11
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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