Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/085465
Kind Code:
A1
Abstract:
This invention improves power resistance while suppressing deterioration of characteristics. An elastic wave device (1) includes a piezoelectric substrate (2) and an electrode (60). The electrode (60) is formed on the piezoelectric substrate (2). The electrode (60) has a first layer (601) and a second layer (602). The first layer (601) includes Al and Cu. The second layer (602) is formed on the side opposite to the piezoelectric substrate (2) side of the first layer (601) and includes Al. The first layer (601) is formed by Al crystals (611) and at least parts of CuAl2 crystal grains (612) arranged in a direction orthogonal to the thickness direction (D1) of the piezoelectric substrate (2). In the electrode (60), the CuAl2 crystal grains (612) do not reach a main surface (621) on the side opposite to the first layer (601) side of the second layer (602).
Inventors:
HAYASHI YASUNOBU
Application Number:
PCT/JP2020/040408
Publication Date:
May 06, 2021
Filing Date:
October 28, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145
Domestic Patent References:
| WO2019009373A1 | 2019-01-10 |
Foreign References:
| JP2002185283A | 2002-06-28 | |||
| JP2005516517A | 2005-06-02 | |||
| JP2018014715A | 2018-01-25 | |||
| JPH07122961A | 1995-05-12 | |||
| JP2005151063A | 2005-06-09 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
Download PDF:
Previous Patent: ELECTRONIC DEVICE AND ANTENNA DEVICE
Next Patent: STRUCTURE AND METHOD FOR MANUFACTURING SAME
Next Patent: STRUCTURE AND METHOD FOR MANUFACTURING SAME