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Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/090775
Kind Code:
A1
Abstract:
Provided is an elastic wave device that uses a silicon carbide substrate as a support substrate, can improve the characteristics of a main mode, and can suppress spurious emissions caused by Rayleigh waves. This elastic wave device 1 comprises a support substrate, a piezoelectric layer 4 that is provided on the support substrate, and an IDT electrode 5 that is provided on the piezoelectric layer 4. The support substrate is a silicon carbide substrate 2 that has a hexagonal crystal structure. SH waves are used as a main mode.

Inventors:
IWAMOTO HIDEKI (JP)
Application Number:
PCT/JP2020/040894
Publication Date:
May 14, 2021
Filing Date:
October 30, 2020
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
WO2019138812A12019-07-18
WO2018088093A12018-05-17
WO2019082806A12019-05-02
WO2013172251A12013-11-21
Foreign References:
JPH08310900A1996-11-26
JP2006524016A2006-10-19
JP2015115870A2015-06-22
JP2017026906A2017-02-02
JPH05183377A1993-07-23
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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