Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/090775
Kind Code:
A1
Abstract:
Provided is an elastic wave device that uses a silicon carbide substrate as a support substrate, can improve the characteristics of a main mode, and can suppress spurious emissions caused by Rayleigh waves. This elastic wave device 1 comprises a support substrate, a piezoelectric layer 4 that is provided on the support substrate, and an IDT electrode 5 that is provided on the piezoelectric layer 4. The support substrate is a silicon carbide substrate 2 that has a hexagonal crystal structure. SH waves are used as a main mode.
Inventors:
IWAMOTO HIDEKI (JP)
Application Number:
PCT/JP2020/040894
Publication Date:
May 14, 2021
Filing Date:
October 30, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
WO2019138812A1 | 2019-07-18 | |||
WO2018088093A1 | 2018-05-17 | |||
WO2019082806A1 | 2019-05-02 | |||
WO2013172251A1 | 2013-11-21 |
Foreign References:
JPH08310900A | 1996-11-26 | |||
JP2006524016A | 2006-10-19 | |||
JP2015115870A | 2015-06-22 | |||
JP2017026906A | 2017-02-02 | |||
JPH05183377A | 1993-07-23 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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