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Patent Searching and Data


Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/187397
Kind Code:
A1
Abstract:
Provided is an elastic wave device that is unlikely to have structural weakness when a cavity is provided in a support substrate. This elastic wave device 1 comprises: a support substrate 2 having a cavity 10; a piezoelectric membrane 3 provided upon the support substrate 2 so as to cover the cavity 10; a functional electrode 4 provided upon the piezoelectric membrane 3 so as to overlap the cavity 10 in the planar view; and a support member 5 disposed in the cavity 10 in the support substrate 2 and supporting the piezoelectric membrane 3. The functional electrode 4 has a plurality of electrodes aligned in a direction that intersects the thickness direction of the piezoelectric membrane 3. The plurality of electrodes face each other in a direction that intersects the thickness direction of the piezoelectric membrane 3 and include a first electrode 6 and a second electrode 7 that are each connected to different potentials. A region in which adjacent electrodes overlap, when viewed from a direction orthogonal to the direction of extension for the first electrode 6, is an intersecting region A. Intersecting region A and the support member 5 overlap in the planar view.

Inventors:
NAGATOMO SHO (JP)
IWAMOTO HIDEKI (JP)
NAKAO TAKESHI (JP)
Application Number:
PCT/JP2021/010276
Publication Date:
September 23, 2021
Filing Date:
March 15, 2021
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
WO2016052129A12016-04-07
WO2016103925A12016-06-30
Foreign References:
JP2009124640A2009-06-04
JP2012034027A2012-02-16
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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