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Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/059759
Kind Code:
A1
Abstract:
Provided is an elastic wave device that suppresses deteriorations in piezoelectric layer characteristics. An elastic wave device according to the present invention comprises: a support substrate; a piezoelectric layer that overlaps with the support substrate, when viewed from a first direction; a functional electrode that is provided on at least a first main surface of the piezoelectric layer; and a wiring electrode that is connected to the functional electrode. There is a space part on a second main surface side of the piezoelectric layer, which is the reverse side from a first main surface of the support substrate. The space part is covered by the piezoelectric layer, the wiring electrode is provided so as to cover a portion of the functional electrode, and a gap or insulating film is provided between the functional electrode and the wiring electrode in the region where the functional electrode is covered by the wiring electrode.

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Inventors:
NAGATOMO SHOU (JP)
OUCHI MINEFUMI (JP)
NODAKE NAOHIRO (JP)
KIMURA TETSUYA (JP)
Application Number:
PCT/JP2021/034204
Publication Date:
March 24, 2022
Filing Date:
September 16, 2021
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17; H03H9/25
Domestic Patent References:
WO2017179300A12017-10-19
WO2020130128A12020-06-25
Foreign References:
JP2020129724A2020-08-27
JP2009232189A2009-10-08
JP2013065997A2013-04-11
JP2003017980A2003-01-17
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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